Low-temperature MoS2 growth on CMOS wafers
Lemme, Max C. (Corresponding author); Daus, Alwin
London [u.a.] : Nature Publishing Group (2023)
Contribution to a book, Journal Article
In: Nature nanotechnology
Volume: 18
Issue: 5
Page(s)/Article-Nr.: 446-447
Institutions
- Chair of Electronic Devices [618710]
Identifier
- DOI: 10.1038/s41565-023-01390-7
- RWTH PUBLICATIONS: RWTH-2023-05470