Investigation of Heater Structures for Thermal Conductivity Measurements of SiO$_{2}$ and Al$_{2}$O$_{3}$ Thin Films Using the 3-Omega Method

Kühnel, Fabian; Metzke, Christoph; Weber, Jonas; Schätz, Josef; Duesberg, Georg S.; Benstetter, Günther (Corresponding author)

Basel : MDPI (2022)
Journal Article

In: Nanomaterials : open access journal
Volume: 12
Issue: 11
Page(s)/Article-Nr.: 1928

Institutions

• Chair of Electronic Devices [618710]