Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications

Fan, Xuge (Corresponding author); Smith, Anderson D.; Forsberg, Fredrik; Wagner, Stefan; Schröder, Stephan; Akbari, Sayedeh Shirin Afyouni; Fischer, Andreas C.; Villanueva, Luis Guillermo; Östling, Mikael; Lemme, Max C. (Corresponding author); Niklaus, Frank (Corresponding author)

London : Macmillan Publishers Limited, SpringerNature (2020)
Journal Article

In: Microsystems & nanoengineering
Volume: 6
Issue: 1
Page(s)/Article-Nr.: 17


  • MICA - Advanced Microelectronic Center Aachen [052600]
  • Chair of Electronic Devices [618710]