Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications

Fan, Xuge (Corresponding author); Smith, Anderson D.; Forsberg, Fredrik; Wagner, Stefan; Schröder, Stephan; Akbari, Sayedeh Shirin Afyouni; Fischer, Andreas C.; Villanueva, Luis Guillermo; Östling, Mikael; Lemme, Max C. (Corresponding author); Niklaus, Frank (Corresponding author)

London : Macmillan Publishers Limited, SpringerNature (2020)
Fachzeitschriftenartikel

In: Microsystems & nanoengineering
Band: 6
Heft: 1
Seite(n)/Artikel-Nr.: 17

Einrichtungen

  • AMICA - Advanced Microelectronic Center Aachen [052600]
  • Lehrstuhl für Elektronische Bauelemente [618710]

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