Suspended Graphene Membranes with Attached Silicon Proof Masses as Piezoresistive Nanoelectromechanical Systems Accelerometers

Fan, Xuge (Corresponding author); Forsberg, Fredrik; Smith, Anderson D.; Schröder, Stephan; Wagner, Stefan; Östling, Mikael; Lemme, Max C. (Corresponding author); Niklaus, Frank (Corresponding author)

Washington, DC : ACS Publ. (2019)
Journal Article

In: Nano letters
Volume: 19
Issue: 10
Page(s)/Article-Nr.: 6788-6799

Institutions

• Chair of Electronic Devices [618710]