Integrating graphene into semiconductor fabrication lines

Neumaier, Daniel (Corresponding author); Pindl, Stephan; Lemme, Max C.

Basingstoke : Nature Publishing Group (2019)
Contribution to a book, Journal Article

In: Nature materials
Volume: 18
Issue: 6
Page(s)/Article-Nr.: 525-529

Institutions

  • Chair of Electronic Devices [618710]

Identifier