Graphene Membranes for Hall Sensors and Microphones Integrated with CMOS-Compatible Processes

Wittmann, Sebastian; Glacer, Christoph; Wagner, Stefan; Pindl, Stephan; Lemme, Max C. (Corresponding author)

Washington, DC : ACS Publications (2019)
Journal Article

In: ACS applied nano materials
Volume: 2
Issue: 8
Page(s)/Article-Nr.: 5079-5085

Institutions

• Chair of Electronic Devices [618710]