Challenges for scanning electron microscopy and inspection on the nanometer scale for non-IC application: and how to tackle them using computational techniques

Bolten, Jens (Corresponding author); Porschatis, Caroline; Wahlbrink, Thorsten; Lemme, Max C.; Ünal, Nezih; Arat, Kerim T.; Behringer, Uwe F. W. (Editor); Finders, Jo (Editor)

Bellingham, Washington : SPIE (2017)
Contribution to a book, Contribution to a conference proceedings

In: 33rd European Mask and Lithography Conference : 26-28 June 2017, Dresden, Germany / Uwe F.W. Behringer, Jo Finders, editors ; organized by VDE/VDI GMM - the Society for Microelectronics, Microsystems and Precision Engineering (Germany)

Institutions

• Chair of Electronic Devices [618710]