Fabrication of wire-MOSFETs on silicon-on-insulator substrate

Heuser, M.; Baus, M.; Hadam, B.; Winkler, O.; Spangenberg, B.; Granzner, R.; Lemme, Max C.; Kurz, Heinrich

Amsterdam [u.a.] : Elsevier (2002)
Journal Article

In: Microelectronic engineering
Volume: 61/62
Page(s)/Article-Nr.: 613-618

Institutions

• Chair of Semiconductor Electronics and Institute of Semiconductor Electronics [616210]
• Chair of Electronic Devices [618710]