Electrical characterization of 12 nm EJ-MOSFETs on SOI substrates

Henschel, W.; Wahlbrink, T.; Georgiev, Y. M.; Lemme, Max C.; Mollenhauer, T.; Vratzov, B.; Fuchs, A.; Kurz, Heinrich; Kittler, Martin; Schwierz, F.

Amsterdam [u.a.] : Elsevier (2004)
Journal Article

In: Solid state electronics : SSE
Volume: 48
Issue: 5
Page(s)/Article-Nr.: 739-745


  • Chair of Semiconductor Electronics and Institute of Semiconductor Electronics [616210]
  • Chair of Electronic Devices [618710]