Tungsten work function engineering for dual metal gate nano-CMOS

Efavi, J. K.; Mollenhauer, T.; Wahlbrink, T.; Gottlob, Heinrich Dieter Bernd; Lemme, Max C.; Kurz, Heinrich

Norwell, Mass : Springer (2005)
Journal Article

In: Journal of materials science / Materials in electronics
Volume: 16
Issue: 7
Page(s)/Article-Nr.: 433-436

Institutions

• Chair of Semiconductor Electronics and Institute of Semiconductor Electronics [616210]
• Chair of Electronic Devices [618710]