Introduction of crystalline high-k gate dielectrics in a CMOS process

Gottlob, Heinrich Dieter Bernd; Lemme, Max C.; Mollenhauer, T.; Wahlbrink, T.; Efavi, J. K.; Kurz, Heinrich; Stefanov, Y.; Haberle, K.; Komaragiri, R.; Ruland, T.; Zaunert, F.; Schwalke, U.

Amsterdam : North Holland Publ. (2005)
Contribution to a conference proceedings, Journal Article

In: Journal of non-crystalline solids
Volume: 351
Issue: 21/23
Page(s)/Article-Nr.: 1885-1889


  • Chair of Semiconductor Electronics and Institute of Semiconductor Electronics [616210]
  • Chair of Electronic Devices [618710]