Nickel-silicide process for ultra-thin-body SOI-MOSFETs

Schmidt, M.; Mollenhauer, T.; Gottlob, Heinrich Dieter Bernd; Wahlbrink, T.; Efavi, J. K.; Ottaviano, L.; Cristoloveanu, S.; Lemme, Max C.; Kurz, Heinrich

Amsterdam [u.a.] : Elsevier (2005)
Contribution to a conference proceedings, Journal Article

In: Microelectronic engineering
Volume: 82
Issue: 3/4
Page(s)/Article-Nr.: 497-502


  • Chair of Semiconductor Electronics and Institute of Semiconductor Electronics [616210]
  • Chair of Electronic Devices [618710]