Highly selective etch process for silicon-on-insulator nano-devices

Wahlbrink, Thorsten; Mollenhauer, Thomas; Georgiev, Y. M.; Henschel, W.; Efavi, J. K.; Gottlob, Heinrich Dieter Bernd; Lemme, Max C.; Kurz, Heinrich; Niehusmann, Jan; Haring BolĂ­var, Peter

Amsterdam [u.a.] : Elsevier (2005)
Contribution to a conference proceedings, Journal Article

In: Microelectronic engineering
Volume: 78/79
Page(s)/Article-Nr.: 212-217


  • Chair of Semiconductor Electronics and Institute of Semiconductor Electronics [616210]
  • Chair of Electronic Devices [618710]