Comparison of metal gate electrodes on MOCVD HfO2

Lemme, Max C.; Efavi, J. K.; Gottlob, Heinrich Dieter Bernd; Mollenhauer, T.; Wahlbrink, T.; Kurz, Heinrich

Oxford [u.a.] : Pergamon Press (2005)
Contribution to a conference proceedings, Journal Article

In: Microelectronics reliability
Volume: 45
Issue: 5/6
Page(s)/Article-Nr.: 953-956


  • Chair of Semiconductor Electronics and Institute of Semiconductor Electronics [616210]
  • Chair of Electronic Devices [618710]