Hot-phonon temperature and lifetime in biased boron-implanted SiO2/Si/SiO2 channels

Liberis, J.; Matulioniene, I.; Matulionis, A.; Lemme, Max C.; Kurz, Heinrich; Först, Michael

Bristol : IOP Publ. (2006)
Journal Article

In: Semiconductor science and technology
Volume: 21
Issue: 6
Page(s)/Article-Nr.: 803-807


  • Chair of Semiconductor Electronics and Institute of Semiconductor Electronics [616210]
  • Chair of Electronic Devices [618710]