Large scale ultraviolet-based nanoimprint lithography

Vratzov, B.; Fuchs, A.; Lemme, Max C.; Henschel, W.; Kurz, Heinrich

New York, NY : American Institute of Physics (2003)
Journal Article

In: Journal of vacuum science & technology : JVST / B
Volume: 21
Issue: 6
Page(s)/Article-Nr.: 2760-2764

Institutions

• Chair of Semiconductor Electronics and Institute of Semiconductor Electronics [616210]
• Chair of Electronic Devices [618710]