Fabrication of monolithic bidirectional switch (MBS) devices with MOS-controlled emitter structures

Baus, M.; Szafranek, Bartholomäus Nikolaus; Chmielus, St.; Lemme, Max C.; Hadam, Birgit; Spangenberg, Bernd; Sittig, R.; Kurz, Heinrich

Piscataway, NJ : IEEE Operations Center (2006)
Contribution to a book, Contribution to a conference proceedings

In: IEEE International Symposium on Power Semiconductor Devices and ICs, 2006 : [ISPSD '06] ; 04 - 08 June 2006, [Naples, Italy]
Page(s)/Article-Nr.: 4 S.


  • Chair of Semiconductor Electronics and Institute of Semiconductor Electronics [616210]
  • Chair of Electronic Devices [618710]