Research Areas

Wafers in a glass holder are inserted in a furnace © Copyright: Martin Braun

We are at your disposal for scientific lectures. If you are interested, please contact our secretariat at any time.

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Wafer with photoresist © Copyright: Martin Braun

Our projects take place in cooperation with other institutes and chairs as well as small, medium and large companies. If you are interested in starting a project with us or you want more information about the projects, please contact us.

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Books © Copyright: Stefan Wagner

Our institute has numerous publications which can be viewed via the RWTH library or via the respective scientific journal on the Internet. The publications can also be requested directly from our chair.

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