Suspended Two-Dimensional Material Membranes For Sensor Applications Fabricated With A High-Yield Transfer Process

Lukas, Sebastian; Kraiem, Ines; Prechtl, Maximilian; Hartwig, Oliver; Grundmann, Annika Olivia; Kalisch, Holger; Kataria, Satender; Heuken, Michael; Vescan, Andrei; Duesberg, Georg S.; Lemme, Max C. (Corresponding author)

Piscataway, NJ] : IEEE (2023)
Contribution to a book, Contribution to a conference proceedings

In: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems Conference (MEMS) : 15-19 Jan. 2023 / conference chairs: Núria Barniol (Universidad Autonoma Barcelona, Spain), Franz Lärmer (Bosch, GmbH, Germany)
Page(s)/Article-Nr.: 627-630


  • Chair of Electronic Devices [618710]