Advanced MOCVD Technology for RF-HEMT Growth on SEMI-Standard Large-Area (111) Silicon Substrates

Mauder, C. (Corresponding author); Hahn, H.; Gao, Z.; Marx, M.; Zweipfennig, Thorsten; Ehrler, Jasmin; Kalisch, Holger; Vescan, Andrei; Bolten, J.; Lemme, Max C.; Alian, A.; Rodriguez, R.; Parvais, B.; Zhao, M.; Heuken, M.

Contribution to a conference proceedings

In: [International Conference on Compound Semiconductor MANufacturing TECHnology, CS MANTECH 2022, 2022-05-09 - 2022-05-12, Monterey, USA]
Page(s)/Article-Nr.: 27-30


  • Compound Semiconductor Technology Teaching and Research Area [612020]
  • Chair of Electronic Devices [618710]