2D-NEMS - 2D-Material Heterostructure NEMS Sensors


Micro- and nanoelectromechanical systems (NEMS) such as pressure sensors, accelerometers and gyroscopes are already widely used. For many applications, however, it is important that NEMS sensors are miniaturised as far as possible. This can be achieved with 2D materials such as graphene, molybdenum disulphide (MoS2) or hexagonal boron nitride (h-BN). The 2D materials have different properties that are advantageous for NEMS sensors.

NEMS devices based on graphene have been explored in our successfully completed project “NanoGram”. Taking a leap further, in 2D-NEMS, we will be exploring the potential of NEMS devices based on heterosctructures of 2D materials. We will be investigating the underlying physics of such novel heterostructured NEMS transducers and implementing the same to achieve significantly high gauge factor as compared to the existing technology. To achieve this goal, we will utilize the technology developed by one of the project partner to fabricate suspended heterostructures based on suitable 2D materials such as graphene, h-BN and 2D transition metal dichalcogenides like MoS2. Heterostructured 2D-NEMS devices will be demonstrated as potential strain gauges, piezoresistive pressured sensors and piezoresistive accelerometers.

The project will contribute to an improved understanding of the material properties and the transduction mechanisms in 2D material heterostructures. This will pave the way for novel NEMS sensors with dramatically reduced size and improved performance. Such sensors will have wide-ranging potential applications, spanning several important scientific and technological areas, including biomedicalimplants, nanoscale robotics, wearable electronics and material characterization.

2D-NEMS is funded by the Deutsche Forschungsgemeinschaft (DFG).

KTH Royal Institute of Technology, Division of Micro and Nanosystems, Stockholm, Sweden

RWTH Aachen, 2nd Institute of Physics, Aachen, Germany

Graphenea, San Sebastián, Spain

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