NobleNEMS - Nanoelectromechanical sensors made of 2D noble metal dichalcogenides

  Sample with PtSe2 devices after wirebonding Copyright: © Source: Sebastian Lukas

NobleNEMS aims to explore highly sensitive nanoelectromechanical sensors (NEMS) made of two-dimensional (2D) materials. The basis for the 2D materials are the noble metals platinum and palladium. The consortium expects significant improvements in the sensitivity and scalability of membrane-based pressure sensors and microphones. In the long term, applications as accelerometers, environmental sensors and infrared photodetectors may be realized. In addition to the coordinator RWTH Aachen University, the TU Dresden and the Universität der Bundeswehr München are project partners. The project is also supported by the companies Infineon, ATV, WITec and AMO. The project is integrated into the Aachen Graphene & 2D Materials Center.

The 2D material platinum diselenide (PtSe2) is a representative of noble metal dichalcogenides (NMD). The electronic properties of PtSe2 are extremely sensitive with respect to mechanical strain. PtSe2 can be produced synthetically using typical semiconductor processes, is stable in air and water, and has already been successfully investigated by the project partners in advance regarding fundamental material properties that could lead to a breakthrough in sensor production. The project additionally includes the research and establishment of further NMDs (platinum/palladium-based sulfides, selenides, tellurides), which have not yet been investigated in detail.

In NobleNEMS, the synthesis of high quality NMDs with typical semiconductor technology techniques is investigated. Electromechanical properties and protocols for material quality and integration will be established. This will result in NEMS devices in the project, which will be used to demonstrate material properties in an application-relevant manner. The comparison of theoretically predicted characteristics, those realized in the laboratory, and those that can be retrieved from demonstrator devices enables the evaluation of the new material class of NMDs with respect to the state of the art.

NobleNEMS is funded by the German Federal Ministry of Education and Research (BMBF).


University of the Bundeswehr Munich, Neubiberg, Germany

Dresden University of Technology, Dresden, Germany

Infineon Technologies AG, Regensburg, Germany

ATV GmbH, Vaterstetten, Germany

WITec GmbH, Ulm, Germany

AMO GmbH, Aachen, Deutschland

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