Publication: Platinum diselenide NEMS pressure sensorsHighly Sensitive Electromechanical Piezoresistive Pressure Sensors Based on Large-Area Layered PtSe2 Films

  Graphene measurement as pressure sensor Copyright: © Stefan Wagner

Electromechanical piezoresistive pressure sensors based on large-area layered platinum diselenide films

First results of the electromechanical properties of the little research 2D material platinum diselenide are presented in the paper “Highly sensitive electromechanical piezoresistive pressure sensors based on large-area layered PtSe2 films”. The work conducted was a collaboration between RWTH Aachen, AMO GmbH, University of the Bundeswehr Munich, Trinity College, University of Siegen, Infineon Technologies AG, University of Leipzig, TU Dresden and the Helmholtz Center Dresden. It has recently been published in ACS Nano letters.

The RWTH Aachen researchers and their colleagues experimentally demonstrated for the first time nanoelectromechanical piezoresistive pressure sensors based on platinum diselenide membranes. This semi-metallic material was grown by thermally assisted conversion of platinum at a CMOS-compatible temperature of 400°C. These pressure sensors show very high sensitivity, orders of magnitudes higher than those of nanomaterial-based devices, including graphene. Furthermore, a high negative gauge factor or -85 was found using platinum diselenide as strain sensor on a bending beam setup.

The research is the result of several funded research projects by by M-ERANET/German Federal Ministry of Education and Research (BMBF, NanoGraM, 03XP0006), by the European Commission under the projects Graphene Flagship (785219), by the European Research Council (ERC, InteGraDe, 3017311), FLAG-ERA (HE 3543/27-1), by Science Foundation Ireland (PI Grant No. 15/IA/3131, 12/RC/2278 and 15/SIRG/3329) and by he German Research Foundation (DFG LE 2440/1-2 and HE 3543/18-1).